Photograph of a microfabricated ICP
in a hybrid package
top view of the ICP shown above with a plasma in the
A side view of the ICP showing
the hybrid package bonded to a 10 mm glass vacuum
chamber. The plasma is generated in argon gas at 8
torr using 350 mW of power.
The evolution of the plasma vs. pressure and
RF power is displayed above and below for air and
argon discharges. The photos were taken with a 35 mm
SLR outfitted with a 50 mm lens plus a +4 diopter
closeup lens. The plasma is viewed through the lower
viewport looking toward the ICP coil.