Home          People        Research Facility   -Microplasma                   -Micromachined ICPs       -Plasma Etching and Micromachining                -Ionized Physical      Vapor Deposition            -Particles in Microplasma -Plasma-Enhanced Atomic Layer Deposition Publications Educational Tools


Tufts Plasma Engineering Laboratory resides in the Science & Technology Center.  The 2000 ft2 class-10,000 cleanroom facility includes basic microfabrication capabilities, microwave circuit prototyping, plasma diagnostic instrumentation, and a class-100 photolithography room.  Details on current research projects are available by following the links on the left.

The resources of the Plasma Engineering Laboratory include:

LPKF Microwave Circuitboard Plotter

Inductively Coupled Plasma Etcher


Ion Beam Sputter Deposition

Plasma Enhanced Atomic Layer Deposition


Nanoparticle Detector Experiment

Microplasma Test Facility/SPEX 0.6m monochromator