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  Research

Tufts Plasma Engineering Laboratory resides in the Science & Technology Center.  The 2000 ft2 class-10,000 cleanroom facility includes basic microfabrication capabilities, microwave circuit prototyping, plasma diagnostic instrumentation, and a class-100 photolithography room.  Details on current research projects are available by following the links on the left.

The resources of the Plasma Engineering Laboratory include:

LPKF Microwave Circuitboard Plotter

Inductively Coupled Plasma Etcher

 
 

Ion Beam Sputter Deposition

Plasma Enhanced Atomic Layer Deposition

 

Nanoparticle Detector Experiment

Microplasma Test Facility/SPEX 0.6m monochromator

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